Accurate Calibration of Microscope Magnification Standard
نویسندگان
چکیده
منابع مشابه
Optical Calibration of a Submicrometer Magnification Standard
The calibration of a new submicrometer magnification standard for electron microscopes is described. The new standard is based on the width of a thin thermal-oxide film sandwiched between a silicon single-crystal substrate and a polysilicon capping layer. The calibration is based on an ellipsometric measurement of the oxide thickness before the polysilicon layer is deposited on the oxide. The u...
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We present a new calibration model of both static distortion and projection for a scanning-electron microscope (SEM). The proposed calibration model depends continuously on the magnification factor. State-of-the-art methods have proposed models to solve the static distortion and projection model but for a discrete set of low and high magnifications: at low magnifications, existing models assume...
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[This corrects the article on p. 267 in vol. 97.].
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NIST is in the process of developing a new scanning electron microscope (SEM) magnification calibration reference standard useful at both high and low accelerating voltages. This standard will be useful for all applications to which the SEM is currently being used, but it has been specifically tailored to meet many of the particular needs of the semiconductor industry. A small number of test sa...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2003
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927603443596